Date of Award

1-1-1987

Degree Type

Dissertation

Degree Name

Ph.D.

Department

Mechanical, Automotive, and Materials Engineering

Keywords

BA2SI2TIO8, BARIUM, BARIUM SILICON TITANATE, Barium silicon titanate, DEPOSITED, FILMS, OXIDE, REACTIVE SPUTTERING, REACTIVELY, Reactive sputtering, SILICON, SPUTTER, THIN, THIN FILMS, TIOX, TITANATE, TITANIUM, TITANIUM OXIDE, Thin films, Titanium oxide

Rights

CC-BY-NC-ND

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