Date of Award


Publication Type

Master Thesis

Degree Name



Electrical and Computer Engineering

First Advisor

Miller, W. C.,


Engineering, Electronics and Electrical.



Creative Commons License

Creative Commons Attribution-Noncommercial-No Derivative Works 4.0 License
This work is licensed under a Creative Commons Attribution-Noncommercial-No Derivative Works 4.0 License.


An investigation of three different photo sensitive devices (PSD) that can be fabricated by using Northern Telecom's 1.2 and 3.0 micro CMOS technology is described in the thesis. A MOSFET has been optimized to enhance the photocurrent and use a parasitic photodiode formed between the source and substrate as a PSD. A conventional BJT structure with a small emitter area has been optimized to enhance the photocurrent and utilize the parasitic photodiode formed at the base-collector junction as a PSD. In addition, a field effect modified (FEM) vertical BJT with a collector-connected annular ring around a small emitter area has been used to create a more sensitive and faster responding parasitic photodiode at the base-collector junction that can be used as a PSD. Each of the three distinct structures has been fabricated in both 1.2 and 3.0 micro technology in a number of different geometries as part of a parameter optimization study. A number of experiments have been carried out on the test cells to measure photocurrent as a function of light intensity using incandescent and LASER light sources. The most sensitive PSD was formed using a 3.0 micro FEM BJT design. The device is being used to create a photo sensitive array that will act as input nodes for an artificial neural network that is being employed as an intelligent sensor for process control based on non-contact measurement. As the array will be used to image LASER generated patterns formed by object-oriented beam steering, high sensitivity is not necessary, whereas a structure that can be readily integrated into a regular array is most important. Source: Masters Abstracts International, Volume: 33-04, page: 1307. Adviser: W. C. Miller. Thesis (M.Sc.A.)--University of Windsor (Canada), 1994.