MEMS microphone design.
Date of Award
Electrical and Computer Engineering
Miller, W. C.,
Engineering, Electronics and Electrical.
CC BY-NC-ND 4.0
This thesis presents an overview of microelectromechanical (MEMS) capacitive type microphone design for use in hearing instruments. A cohesive methodology is achieved via a mechanical equation of motion. Resulting in displacement, change in capacitance, sensitivity and pull-in voltage. All derived from one equation. From this investigation it is apparent that sensitivity is the most important factor in MEMS microphone design. The topics covered in the overview are: MEMS microphone design considerations, comparison of microphone types, signal detection methods, sources of dampening, modeling methods, sensitivity estimation, pull-in voltage estimation, bias voltage, ultimate tensile strength, design space optimization and MEMS microphone design flow. A current state of the art design is used as an example throughout the overview. The current state of the art design utilises a square diaphragm with width 2600, thickness 3 and air gap 4 mum, with 361 vent holes of effective radius 33.9 mum in a 13 mum thick backplate. With the initial modeling conclusions in place, two new MEMS capacitive microphone designs are introduced, modeled and analysed. (Abstract shortened by UMI.)Dept. of Electrical and Computer Engineering. Paper copy at Leddy Library: Theses & Major Papers - Basement, West Bldg. / Call Number: Thesis2003 .S65. Source: Masters Abstracts International, Volume: 42-05, page: 1829. Adviser: W. C. Miller. Thesis (M.A.Sc.)--University of Windsor (Canada), 2003.
Sliepenbeek, James, "MEMS microphone design." (2003). Electronic Theses and Dissertations. 2701.