Date of Award

1-1-1987

Publication Type

Doctoral Thesis

Degree Name

Ph.D.

Department

Mechanical, Automotive, and Materials Engineering

Keywords

BA2SI2TIO8, BARIUM, BARIUM SILICON TITANATE, Barium silicon titanate, DEPOSITED, FILMS, OXIDE, REACTIVE SPUTTERING, REACTIVELY, Reactive sputtering, SILICON, SPUTTER, THIN, THIN FILMS, TIOX, TITANATE, TITANIUM, TITANIUM OXIDE, Thin films, Titanium oxide

Rights

info:eu-repo/semantics/openAccess

Creative Commons License

Creative Commons Attribution-Noncommercial-No Derivative Works 4.0 License
This work is licensed under a Creative Commons Attribution-Noncommercial-No Derivative Works 4.0 License.

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