Date of Award
Industrial and Manufacturing Systems Engineering
MEMS based low damping inertial resonators are the key element in the development of precision vibratory gyroscopes. High quality factor (Q factor) is a crucial parameter for the development of high precision inertial resonators. Q factor indicates how efficient a resonator is at retaining its energy during oscillations. Q factor can be limited by different types of energy losses, such as anchor damping, squeeze-film damping, and thermoelastic damping (TED). Understanding the energy loss-mechanism can show a path for designing high Q resonator. This thesis explores the effects of different design parameters on Q factor of 3D inertial resonators. TED loss mechanisms in a 3D non-inverted wineglass (hemispherical) shell resonator and a disk resonator were investigated. Both the disk and shell share the same vibration modes, and they are widely used as a vibratory resonator shape. Investigation with loss-mechanism shows that robust mechanical materials such as fused silica can offer ultra-low damping during oscillation. TED loss resulting from the effects of geometric parameters (such as thickness, height, and radius), mass imbalance, thickness non-uniformity, and edge defects were investigated. Glassblowing was used to fabricate hemispherical 3D shell resonators and conventional silicon based dry etching was used to fabricate micro disk resonators. The results presented in this thesis can facilitate selecting efficient geometric and material properties for achieving a higher Q-factor in 3D inertial resonators. Enhancing the Q-factor in MEMS based 3D resonators can further enable the development of high precision resonators and gyroscopes.
Liu, Jiewen, "Development of a low damping MEMS resonator" (2018). Electronic Theses and Dissertations. 7377.