Spring Design for High-Performance Microelectromechanical System (MEMS) Based Tuning Fork Gyroscope
Date of Award
Mechanical, Automotive, and Materials Engineering
Gyroscope, Microelectromechanical system, Spring design, Tuning fork gyroscope, Frequency split
Creative Commons License
This work is licensed under a Creative Commons Attribution 4.0 International License.
Microelectromechanical system (MEMS) is a technology that combines microelectronic system and a micromechanical system. The MEMS tuning fork gyroscope is made up of two proof masses, electrodes, anchors, springs, actuators, and detectors. An important factor to evaluate the performance of a gyroscope is sensitivity. This project utilizes finite element analysis (FEA) and CAD tools to numerically simulate the gyroscope performance. Three different geometric gyroscope designs were designed and simulated. The third design was selected to be the finalized gyroscope geometry to simulate two kinds of springs. Finally, the gyroscope with the assigned spring that had a better performance was manufactured. This project investigated the relationship between frequency split and spring geometric variation. The optimized spring parameters were captured. A gyroscope with a frequency split of 0 Hz has the highest sensitivity. The displacements of the finalized tuning fork gyroscope with folded spring and u-shaped spring respectively were performed in gyroscope response simulation. The results demonstrated that the gyroscope with u-shaped springs had a larger sense displacement, which means higher sensitivity. Finally, the gyroscope with a folded spring attached was selected for manufacturing due to the lower maximum von Mises stress and the maximum von Mises stress of the folded spring is smaller than that of the u-shaped spring by 33%. The fabrication process utilized was PiezoMUMPs, which is a cost-effective and commercially available multipurpose process.
Yan, Huaishen, "Spring Design for High-Performance Microelectromechanical System (MEMS) Based Tuning Fork Gyroscope" (2023). Electronic Theses and Dissertations. 8943.