"Built-In Self-Test Solution for CMOS MEMS Sensors" by Iftekhar Basith

Date of Award

2011

Publication Type

Master Thesis

Degree Name

M.A.Sc.

Department

Electrical and Computer Engineering

Keywords

Electrical engineering.

Supervisor

Ahmadi, Majid (Electrical and Computer Engineering)

Rights

info:eu-repo/semantics/openAccess

Abstract

This thesis presents a new readout circuit with integrated Built-in Self-Test (BIST) structure for capacitive Micro-Electro-Mechanical Systems (MEMS). In the proposed solution instead of commonly used voltage control signals to test the device, charge control stimuli are employed to cover a wider range of structural defects. The proposed test solution eliminates the risk of MEMS structural collapse in the test phase. Measurement results using a prototype fabricated in TSMC 65nm CMOS technology indicate that the proposed BIST scheme can successfully detect minor structural defects altering MEMS nominal capacitance.

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