Date of Award
6-1-2023
Publication Type
Thesis
Degree Name
M.A.Sc.
Department
Electrical and Computer Engineering
Keywords
MEMS;Micropump
Supervisor
Arezoo Emadi
Supervisor
Jalal Ahamed
Rights
info:eu-repo/semantics/openAccess
Creative Commons License
This work is licensed under a Creative Commons Attribution 4.0 International License.
Abstract
Micro-Electro-Mechanical Systems (MEMS) refers to a technology which uses microfabrication technology to fabricate miniaturized devices and systems. MEMS based technologies have paved the way for miniaturization and manufacturing of devices with applications ranging from biological to fluid engineering. This interdisciplinary nature of MEMS has given rise to an emerging field called microfluidics which studies devices that pump, control and sense small volumes of fluids. This work aims to investigate a piezoelectric micropump that can mimic mammalian olfaction for e-nose applications. A comprehensive literature review was conducted on all the available micropumps. A piezoelectric micropump was chosen as the candidate for this work based upon the literature review. The physics behind the micropump is studied and the critical parameters are analyzed. A computational model of the piezoelectric micropump is investigated using COMSOL Multiphysics platform and the effects of the critical parameters are analyzed. The critical parameters which include effects of piezoelectric layer, pump chamber, nozzle-diffuser elements and membrane are investigated and analyzed.
Recommended Citation
Babu Lopez, Yameema, "Computational Analysis Investigation of a Piezoelectrically Actuated Micropump for Air Sniffing Applications" (2023). Electronic Theses and Dissertations. 9366.
https://scholar.uwindsor.ca/etd/9366